Characterization of atomic-scale materials traditionally requires human experts with months to years of specialized training. Even for trained human operators, accurate and reliable characterization remains challenging when examining newly discovered materials such as two-dimensional (2D) structures. This bottleneck drives demand for fully autonomous experimentation systems capable of comprehending research objectives without requiring large training datasets. In this work, we present ATOMIC (Autonomous Technology for Optical Microscopy & Intelligent Characterization), an end-to-end framework that integrates foundation models to enable fully autonomous, zero-shot characterization of 2D materials. Our system integrates the vision foundation model (i.e., Segment Anything Model), large language models (i.e., ChatGPT), unsupervised clustering, and topological analysis to automate microscope control, sample scanning, image segmentation, and intelligent analysis through prompt engineering, eliminating the need for additional training. When analyzing typical MoS2 samples, our approach achieves 99.7% segmentation accuracy for single layer identification, which is equivalent to that of human experts. In addition, the integrated model is able to detect grain boundary slits that are challenging to identify with human eyes. Furthermore, the system retains robust accuracy despite variable conditions including defocus, color temperature fluctuations, and exposure variations. It is applicable to a broad spectrum of common 2D materials-including graphene, MoS2, WSe2, SnSe-regardless of whether they were fabricated via chemical vapor deposition or mechanical exfoliation. This work represents the implementation of foundation models to achieve autonomous analysis, establishing a scalable and data-efficient characterization paradigm that fundamentally transforms the approach to nanoscale materials research.

本研究解决了传统二维材料表征中对专家知识和大量训练数据的依赖问题，提出了一种名为ATOMIC的全自主实验框架。该框架利用基础模型实现零-shot特性，可以在复杂条件下准确识别材料特征，标记单层的分割准确率达到99.7%，这将显著改变纳米材料研究的方式。

零-shot自主显微镜：可扩展智能的二维材料表征