As the globalization of semiconductor design and manufacturing processes
continues, the demand for defect detection during integrated circuit
fabrication stages is becoming increasingly critical, playing a significant
role in enhancing the yield of semiconductor products. Traditional wafer map
defect pattern detection methods involve manual inspection using electron
microscopes to collect sample images, which are then assessed by experts for
defects. This approach is labor-intensive and inefficient. Consequently, there
is a pressing need to develop a model capable of automatically detecting
defects as an alternative to manual operations. In this paper, we propose a
method that initially employs a pre-trained VAE model to obtain the fault
distribution information of the wafer map. This information serves as guidance,
combined with the original image set for semi-supervised model training. During
the semi-supervised training, we utilize a teacher-student network for
iterative learning. The model presented in this paper is validated on the
benchmark dataset WM-811K wafer dataset. The experimental results demonstrate
superior classification accuracy and detection performance compared to
state-of-the-art models, fulfilling the requirements for industrial
applications. Compared to the original architecture, we have achieved
significant performance improvement.

这篇论文提出了一种利用预训练的 VAE 模型获取晶圆图故障分布信息，并结合原始图像集进行半监督模型训练的方法。通过师生网络的迭代学习，该模型在 WM-811K 晶圆数据集上验证得到了卓越的分类准确性和检测性能，实现了对工业应用的要求，并在性能上有显著的提升。